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ICOP & ICPET 2014, 20 - : 597-600 Back to browse issues page
Three Dimensional Surface Topography Measurement by Phase Modulated Mirau Interferometeric Microscope
Sara Mohajerani Ms. * 1, Mostafa Aakhte Mr.1, Jafar Mostafavi Amjad Dr.1, Dariush Abdolahpour Dr.1, Ehsan Ahadi Akhlaghi Dr.1
1- Institute for Advanced Studies in Basic Sciences
Abstract:   (3470 Views)
In this paper, a method for measuring 3D surface topography by using a phase modulated Mirau interferometric microscope is presented. Phase shifting is one of the methods to analyze interference patterns of the microscope. In this research an LCD is used as a phase modulator to apply the phase shifts. The advantages of this method compared to the conventional methods are the possibility of high-speed data acquisition and non-mechanical phase shifting.
Keywords: Phase Modulation, Phase Shift, 3D Topography measurement, Mirau Interferometer Microscope.
Full-Text [PDF 624 kb]   (677 Downloads)    
Type of Study: Research | Subject: Special
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Mohajerani S, aakhte M, Mostafavi Amjad J, Abdolahpour D, Ahadi Akhlaghi E. Three Dimensional Surface Topography Measurement by Phase Modulated Mirau Interferometeric Microscope. ICOP & ICPET. 2014; 20 :597-600
URL: http://opsi.ir/article-1-273-en.html


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انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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