Association Mission
The mission of the association is to advance the creation, communication and application of knowledge to benefit society and improve people's lives.
Legal Members
Membership
Contact Us
Download citation:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:
Mohajerani S, aakhte M, Mostafavi Amjad J, Abdolahpour D, Ahadi Akhlaghi E. Three Dimensional Surface Topography Measurement by Phase Modulated Mirau Interferometeric Microscope. ICOP & ICPET _ INPC _ ICOFS 2014; 20 :597-600
URL: http://opsi.ir/article-1-273-en.html
URL: http://opsi.ir/article-1-273-en.html
Sara Mohajerani * 
1, Mostafa Aakhte1 , Jafar Mostafavi Amjad1 , Dariush Abdolahpour1 , Ehsan Ahadi Akhlaghi1
1, Mostafa Aakhte1 , Jafar Mostafavi Amjad1 , Dariush Abdolahpour1 , Ehsan Ahadi Akhlaghi1
1- Institute for Advanced Studies in Basic Sciences
Abstract: (5704 Views)
In this paper, a method for measuring 3D surface topography by using a phase modulated Mirau interferometric microscope is presented. Phase shifting is one of the methods to analyze interference patterns of the microscope. In this research an LCD is used as a phase modulator to apply the phase shifts. The advantages of this method compared to the conventional methods are the possibility of high-speed data acquisition and non-mechanical phase shifting.
Keywords: Phase Modulation, Phase Shift, 3D Topography measurement, Mirau Interferometer Microscope.
Send email to the article author
| Rights and permissions | |
 |
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License. |
