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ICOP & ICPET 2014, 20 - : 541-544 Back to browse issues page
An exact method for determination of optical constants of HfO2 thin film in the near-infrared region
Samaneh Falahatpour * 1, Abbas Behjat Dr., Mahdi Mardiha
Abstract:   (4060 Views)
There are various methods for determination of optical parameters of thin films. One of these methods is optimization method. First we practically deposited a HfO2 thin film onto Ge Substrate by vacuum evaporation technique and transmittance spectra was measured in the infrared region. After the exact studies, a computer program written in MATLAB for Genetic Algorithm(GA) optimization method and its results test with exact values from Essential Macleod software . By using this method, the thin film sellmeier coefficient were optimized and subsequently we could extract optical constants(refractive index and extinction coefficient) of sample with good accuracy in the NIR region. Comparision data of this method with past researchs gave rise this result: the GA is an almost exact method for determination of thin films optical parameters.
Keywords: genetic algorithm, extinction coefficient, refractive index, thin film
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Type of Study: Research | Subject: Special
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falahatpour S, Behjat A, Mardiha M. An exact method for determination of optical constants of HfO2 thin film in the near-infrared region . ICOP & ICPET. 2014; 20 :541-544
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Volume 20 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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