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falahatpour S, Behjat A, Mardiha M. An exact method for determination of optical constants of HfO2 thin film in the near-infrared region . ICOP & ICPET _ INPC _ ICOFS 2014; 20 :541-544
URL: http://opsi.ir/article-1-253-en.html
URL: http://opsi.ir/article-1-253-en.html
An exact method for determination of optical constants of HfO2 thin film in the near-infrared region
Abstract: (5743 Views)
There are various methods for determination of optical parameters of thin films. One of these methods is optimization method. First we practically deposited a HfO2 thin film onto Ge Substrate by vacuum evaporation technique and transmittance spectra was measured in the infrared region. After the exact studies, a computer program written in MATLAB for Genetic Algorithm(GA) optimization method and its results test with exact values from Essential Macleod software . By using this method, the thin film sellmeier coefficient were optimized and subsequently we could extract optical constants(refractive index and extinction coefficient) of sample with good accuracy in the NIR region. Comparision data of this method with past researchs gave rise this result: the GA is an almost exact method for determination of thin films optical parameters.
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