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ICOP & ICPET 2014, 20 - : 1357-1360 Back to browse issues page
Fabrication of Suspended Polymeric Photonic Crystal
Afshin Shahalizad , Reza Asadi * 1, Maryam Ganji , Payam Heydari
Abstract:   (3088 Views)
In this experimental work, a novel SU8-based Photonic Crystal which can be used in acceleration sensors is introduced. By utilizing two-beam laser lithography (He-Cd laser) method, a one-dimensional Photonic Crystal on a thin layer of SU8 photoresist with lattice constant of 670 nm was fabricated. Then, by layer deposition and etching processes the multilayer metallic substrate was removed, and finally, by releasing the structure the crystalized layer was suspended.
Keywords: Suspended Photonic Crystal, SU-8 photoresist, Two-beam interference laser lithography
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Type of Study: Research | Subject: Special
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Shahalizad A, Asadi R, Ganji M, Heydari P. Fabrication of Suspended Polymeric Photonic Crystal. ICOP & ICPET. 2014; 20 :1357-1360
URL: http://opsi.ir/article-1-222-en.html

Volume 20 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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