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Shahalizad A, Asadi R, Ganji M, Heydari P. Fabrication of Suspended Polymeric Photonic Crystal. ICOP & ICPET _ INPC _ ICOFS 2014; 20 :1357-1360
URL: http://opsi.ir/article-1-222-en.html
URL: http://opsi.ir/article-1-222-en.html
Abstract: (4701 Views)
In this experimental work, a novel SU8-based Photonic Crystal which can be used in acceleration sensors is introduced. By utilizing two-beam laser lithography (He-Cd laser) method, a one-dimensional Photonic Crystal on a thin layer of SU8 photoresist with lattice constant of 670 nm was fabricated. Then, by layer deposition and etching processes the multilayer metallic substrate was removed, and finally, by releasing the structure the crystalized layer was suspended.
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