Volume 26 - ICOP & ICPET 2020
ICOP & ICPET _ INPC 2020, 26 - ICOP & ICPET 2020: 729-732 |
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Parsanasab G M, Taghavi M, Mostajeran S. spin-coated deposition of Chalcogenide for Lithography. ICOP & ICPET _ INPC. 2020; 26 :729-732
URL: http://opsi.ir/article-1-2168-en.html
URL: http://opsi.ir/article-1-2168-en.html
1- Shahid Beheshti University
Abstract: (378 Views)
In this study, we first investigated the feasibility of a solution made of different types of chalcogenide powders and concluded that only amorphous chalcogenides could provide a suitable solution for spin-coated deposition. After repeating the experiments, we found that when we heat them in order to remove the solvent from the deposited films, this must be done under vacuum. Then, by direct laser writing with a continuous green laser at 100um /s at 3mw power on the films and chemically etching them, we achieved 2um optical waveguides.
Keywords: Soluble material method, spin-coated deposition, Optical Waveguide, Chalcogenide photoresists
