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Nezamdoost H, Kimiagar S, jannesari M. Deposition of Diamond-like carbon utilizing Physical vapor deposition. ICOP & ICPET _ INPC _ ICOFS 2014; 20 :581-584
URL: http://opsi.ir/article-1-269-en.html
URL: http://opsi.ir/article-1-269-en.html
1- Tehran central branch
2- Yazd university
2- Yazd university
Abstract: (5528 Views)
In this research, carbon deposited on ZnS as substrate and Y2O3 as meddle layer by Physical vapor deposition method. The effect of deposition rate on transparency of produced samples in infrared range were investigated by FTIR and Raman spectroscopy. It was observed that produced DLC films have different structural characteristics using various deposition rates. Samples produced with 30Ao/s deposition rate and temperature of 100 0C have more optical transmission and sp3 sites which was 32%. These samples showed better mechanical quality according to MIL-48616 standard.
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