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year 27, Issue 1 (Iranian Nano-Photonic Conference 2020 2020)
ICOP & ICPET _ INPC _ ICOFS 2020, 27(1): 100-102 |
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Kalate Seyfari A, Bahadoran M, Honarasa G. Design of micro optical pressure sensor using cascaded ring resonator. ICOP & ICPET _ INPC _ ICOFS 2020; 27 (1) :100-102
URL: http://opsi.ir/article-1-2266-en.html
URL: http://opsi.ir/article-1-2266-en.html
1- Department of Physics, Shiraz University of Technology, 31371555, Shiraz, Fars, Iran.
Abstract: (1433 Views)
A micro-size pressure sensor is designed using the cascaded ring resonator. The sensor consisted of two ring resonator of silicon core waveguide on the silica substrate that placed on the rectangular silicon-diaphragm. The deflection and displacement of diaphragm under the applied pressure is calculated using finite element method. The wavelength response of the sensor is simulated using the delay line signal approach. The sensitivity of 41pm/kPa is achieved for the proposed sensor that is quite higher sensitivity rather than the conventional optical-based pressure sensors.
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