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URL: http://opsi.ir/article-1-1844-en.html
Information about the earth’s crust can be revealed by the measuring of gravity; furthermore, gravimeters can be used in space science, the studying of planets, discovering of hydrogen sources, magma surveys, and geography. Low-cost, high-sensitivity, and low-size are critical needs in gravimetry. High sensitivity, low resonance frequency, low cost, ability for array production, and small size features make a wide applications of gravimeters to be commercial. In this paper, a new structure as gravimeter based on optical ROC and MEMS technology is introduced. The designed sensor has small size, easy release procedure, and low noise while an optical ROC is employed. In summary, a low bandwidth, high-sensitivity, and small MEMS-based Gravimeter is demonstrated, which this could open a way for MEMS gravimeters to be accurate and be commercially used.
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