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tahernia A, raoufi D, eftekhari L. Determination of Thickness, Density and Roughness of ITO Thin Film by XRR Technique. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :177-180
URL: http://opsi.ir/article-1-505-en.html
URL: http://opsi.ir/article-1-505-en.html
1- Bu Ali Sina university
Abstract: (4535 Views)
In this paper Indium Tin Oxide (ITO) thin films have been prepared on glass substrate by electron beam evaporation method. Then we use the X-ray reflectivity technique (XRR), and plot logarithmic chart of the intensity versus 2θ (θ is the incidence angle of x-ray). So, using the XRR data we compute the thickness, density and roughness of the ITO thin films. The results showed good agreement with AFM and transmittance spectra on UV-VIS-NIR range
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