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Mohajerani S, aakhte M, Mostafavi Amjad J, Abdolahpour D, Ahadi Akhlaghi E. Three Dimensional Surface Topography Measurement by Phase Modulated Mirau Interferometeric Microscope. ICOP & ICPET _ INPC _ ICOFS 2014; 20 :597-600
URL: http://opsi.ir/article-1-273-en.html
URL: http://opsi.ir/article-1-273-en.html
Sara Mohajerani *1 
, Mostafa Aakhte1 , Jafar Mostafavi Amjad1 , Dariush Abdolahpour1 , Ehsan Ahadi Akhlaghi1
, Mostafa Aakhte1 , Jafar Mostafavi Amjad1 , Dariush Abdolahpour1 , Ehsan Ahadi Akhlaghi1
1- Institute for Advanced Studies in Basic Sciences
Abstract: (6088 Views)
In this paper, a method for measuring 3D surface topography by using a phase modulated Mirau interferometric microscope is presented. Phase shifting is one of the methods to analyze interference patterns of the microscope. In this research an LCD is used as a phase modulator to apply the phase shifts. The advantages of this method compared to the conventional methods are the possibility of high-speed data acquisition and non-mechanical phase shifting.
Keywords: Phase Modulation, Phase Shift, 3D Topography measurement, Mirau Interferometer Microscope.
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