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ICOP & ICPET 2015, 21 - : 377-380 Back to browse issues page
Modeling of CW Laser Thermal Ablation in Laser Scanning Lithography on Copper Thin-Film
Omid Choupanian Mr., Khosro Maadanipour Dr. * 1
Abstract:   (2439 Views)
ablation phenomena in the process of laser interaction with matter, usually occurs with pulsed lasers. In the case of cw lasers when incident intensity is high enough the thermal ablation process occurs will lead to evaporation or sublimation of matter. In this work, a cw laser for mask manufacturing process based on laser scanning lithography is used. a model for using the cw laser in ablation process is presented in which due to the scanning nature of lithography,the energy flux received by each point is intended as a time pulse. The laser pulse energy obtained with the power, spot size and the scanning speed of the sample exposed to radiation. in the following, laser ablation of copper thin-film has been simulated and the effect of laser pulse energy ablation has been investigated. Also by curve fitting the data obtained from this modeling, threshold pulse energy of ablation for copper thin-film with a thickness of 150nm has been calculated.
Keywords: Thermal Ablation, Laser Scanning Lithography, Copper Thin-Film.
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Type of Study: Research | Subject: Special
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Choupanian O, maadanipour K. Modeling of CW Laser Thermal Ablation in Laser Scanning Lithography on Copper Thin-Film . ICOP & ICPET. 2015; 21 :377-380
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Volume 21 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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