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ICOP & ICPET 2015, 21 - : 177-180 Back to browse issues page
Determination of Thickness, Density and Roughness of ITO Thin Film by XRR Technique
Atefeh Tahernia * 1, Davood Raoufi 1, Leila Eftekhari 1
1- Bu Ali Sina university
Abstract:   (2376 Views)
In this paper Indium Tin Oxide (ITO) thin films have been prepared on glass substrate by electron beam evaporation method. Then we use the X-ray reflectivity technique (XRR), and plot logarithmic chart of the intensity versus 2θ (θ is the incidence angle of x-ray). So, using the XRR data we compute the thickness, density and roughness of the ITO thin films. The results showed good agreement with AFM and transmittance spectra on UV-VIS-NIR range
Keywords: Thin film, X-Ray reflectivity (XRR), Indium Tin Oxide (ITO).
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Type of Study: Research | Subject: Special
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tahernia A, raoufi D, eftekhari L. Determination of Thickness, Density and Roughness of ITO Thin Film by XRR Technique. ICOP & ICPET. 2015; 21 :177-180
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Volume 21 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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