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year 28, Issue 1 (1st Iranian Conference on optical fiber sensors (ICOFS 2021) 2021)
ICOP & ICPET _ INPC _ ICOFS 2021, 28(1): 46-48 |
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Rezaee Sirous P, Batebi S. Optical measurement of semiconductor layer. ICOP & ICPET _ INPC _ ICOFS 2021; 28 (1) :46-48
URL: http://opsi.ir/article-1-2506-en.html
URL: http://opsi.ir/article-1-2506-en.html
1- Dept. of Physics, Faculty of Basic Sciences, University of Guilan, Rasht, Iran
Abstract: (667 Views)
One of the requirements of research in the field of Nanotechnology is making and developing equipment for observing and measuring. In this study, a non-contact optical system is designed and made for measurement of semiconductor layer thickness. A red laser with a 632.8 nm wavelength (power of 2 mW), a proper optical design and arrangement of Fabry Perot interferormeter are used for interference fringes. As the thickness of semiconductor layer varies, the fringe spherical interference constantly changes as well. Then, the thickness of layers can be gauged by counting the lines. The variations are measured through several methods by a suitable optical set up, forming spherical lines, designing integrated circuit and using artificial intelligence. Meanwhile, the measurement methods were investigated. Finally, the best result and minimum measurement of 600 nm was recorded using image and video analysis by MATLAB program and utilizing photodiode Tsl 250.
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