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ICOP & ICPET 2014, 20 - : 1349-1352 Back to browse issues page
Fabrication of deformable polymer micro-mirror with electrostatic actuation
Mehrnaz Esfandiari Miss * 1, Reza Asadi Dr, Payam Heydari Dr, Alireza Shamsi Mr
Abstract:   (2987 Views)
In this paper,a novel method for fabrication of a polymeric deformable micro-mirror with electrostatic actuator is presented.Electrostatic actuators are a desirable choice for micro-mirrors due to their accurate deformation control and simple fabrication process.Despite these promising the development of the electrostatic actuator is limited because of for high actuation voltage.To solve this problem,we utilize metalized thin SU-8 diaphragm as deformable mirror.but the Surface roughness of polymeric mirror is lower than silicon ones.in this paper we propose the fabrication method to overcome this problem.Furthermore the proposed method has using a fast‌ and low-cost fabrication method by the high quality of surface mirror.
Keywords: Adaptive optics, electrostatic actuator, micromirror, SU-8
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Type of Study: Research | Subject: Special
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esfandiari M, Asadi R, heydari P, shamsi A. Fabrication of deformable polymer micro-mirror with electrostatic actuation. ICOP & ICPET. 2014; 20 :1349-1352
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Volume 20 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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