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Fallah Hamidabadi V, Sobh Khiz N, Moshaii A. Simulation of growth of an array oblique nanorod in the glancing angle deposition (GLAD) . ICOP & ICPET _ INPC _ ICOFS 2014; 20 :837-840
URL: http://opsi.ir/article-1-341-en.html
URL: http://opsi.ir/article-1-341-en.html
1- Tarbiat Modares University
Abstract: (5186 Views)
We describe an atomic simulator for thin film deposition in three dimension. The simulation is designed to model the glancing angle deposition with ballistic deposition. For study the growth of Ag thin film, at first we simulate with Nano Scale Model software (NASCAM)code then we fabricate nanorods by glancing angle deposition method. We have also studied the morphology of the Ag surface that fabricate with glancing angle deposition technique. The effect of adatom incident angle fluctuation in nanorods fabrication and the diameter of Ag nanorod are studied. The diameter of nanorod is calibrated by 4 degree incident atom angle fluctuation. As a result, Ag nanorods with diameter less than 40 nm has been produced.
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