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year 28, Issue 2 (ICOP & ICPET 2022 2022)
ICOP & ICPET _ INPC _ ICOFS 2022, 28(2): 894-897 |
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ghazanfar M, Behroodi E, Latifi H. Design and Fabrication of an Auto-Focus System Based on Astigmatism Method for Direct Write Laser Lithography. ICOP & ICPET _ INPC _ ICOFS 2022; 28 (2) :894-897
URL: http://opsi.ir/article-1-2622-en.html
URL: http://opsi.ir/article-1-2622-en.html
1- Shahid Beheshti University
Abstract: (337 Views)
There are many challenges to build an integrated photonic circuit. One of the challenges of building such circuits is the instant auto-focus of the laser beam on the surface of the photoresist. In this regard an auto-focus system was built and fabricated. This system is based on astigmatism method. This auto-focus system can distinguish surface roughness of the photoresist with resolution of 130 nanometers and operate without the use of any software and as a standalone system with very high speeds while the direct write laser lithography is being done.
Type of Study: Experimental |
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