In this paper, we propose an ultrasensitive optical Micro-Electro-Mechanical-System (MEMS) accelerometer based on wavelength modulation, using one dimensional photonic crystal (PC). An air-dielectric multi-layer Photonic Band Gap (PBG) material, a typical Laser diode (LD) light source, a Photo Diode and integrated optical waveguides build up the optical sensing system of the proposed device. Functional characteristics of the proposed accelerometer are as follows: a mechanical sensitivity of , an optical sensitivity of and a linear measurement range of to . Regarding to the mentioned characteristics, the proposed MOEMS accelerometer is suitable for a wide range of applications such as inertial navigation, consumer electronics, automotive, etc.
Sheikhaleh Arash، Abedi Kambiz، Jafari Kian. An Optical Accelerometer Based on Wavelength Modulation of Light. کنفرانس اپتیک و فوتونیک ایران و کنفرانس مهندسی و فناوری فوتونیک ایران. 1395; 23 () :1129-1132