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Shahbazi A H, Madani Pour K, Koohian A. Quality Determination of Laser Scanning in Optical Mask Construction by Modulation Transfer Function. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :989-992
URL: http://opsi.ir/article-1-865-en.html
URL: http://opsi.ir/article-1-865-en.html
Quality Determination of Laser Scanning in Optical Mask Construction by Modulation Transfer Function
1- University of Tehran
2- AmirKabir University of Technology
2- AmirKabir University of Technology
Abstract: (3402 Views)
Laser scanning is one of the methods used in Lithography. It’s also useful in optical mask construction. In this paper a method for quality determination of optical mask is presented. The method is based on Modulation Transfer Function (MTF). In order to construct an optical mask, a copper thin film (with high absorption in visible and UV spectra) and a high power 532nm scanning laser is utilized. Finally MTF is formed using Fourier transform of the mask image which could be interpreted as a quality factor.
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