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year 27, Issue 2 (ICOP & ICPET 2021 2021)
ICOP & ICPET _ INPC _ ICOFS 2021, 27(2): 17-20 |
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Bostandoust E, Fathollahi khalkhali T, Hajiesmaeilbaigi F, Razaghi H, Motamedi A, Goodarzi R. Creation of micro channels by two photon polymerization method with femtosecond laser pulses. ICOP & ICPET _ INPC _ ICOFS 2021; 27 (2) :17-20
URL: http://opsi.ir/article-1-2295-en.html
URL: http://opsi.ir/article-1-2295-en.html
Eftekhar Bostandoust *1 
, Taymaz Fathollahi khalkhali1 , Fereshteh Hajiesmaeilbaigi1 , Hosein Razaghi1 , Asma Motamedi1 , Reza Goodarzi1
, Taymaz Fathollahi khalkhali1 , Fereshteh Hajiesmaeilbaigi1 , Hosein Razaghi1 , Asma Motamedi1 , Reza Goodarzi1
1- Photonics and Quantum Technologies Research School, Nuclear Science and Technology Research Institute, Tehran, Iran
Abstract: (974 Views)
The two photon polymerization method is based on nonlinear processes such as two photon or multi photon absorption. In order to observe two-photon absorption or multi-photon absorption for materials that have negligible one-photon absorption coefficient at the laser wavelength the high peak power density is needed. In this paper creation of micro channels on positive photoresist S1813 with high intensity femtosecond pulses of Ti:Sapphire laser has been investigated experimentally. The quality and size of channels is investigated by changing the mean power of the laser beam. The optimum channel with 8 μm diameter, has been made by pulses with 45 femtosecond duration and 94 mW mean power of the laser beam.
Keywords: two photon polymerization, femtosecond pulse, direct laser writing, photolithography, photoresist
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