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ICOP & ICPET 2015, 21 - : 777-780 Back to browse issues page
Thickness measurement using the extrema of the intensity profile in Fresnel diffraction from a phase step
Yasaman Ganjkhani Ms * 1, Mohammad Taghi Tavassoli Mr1, Seyed Roohollah Hosseini Mr1, Morteza Jafari Siavashani Mr2, Ataollah Koohian Mr1
1- Tehran university
2- IASBS ,Zanjan
Abstract:   (2147 Views)
In Fresnel diffraction from a phase step, the intensity profile and spacing between its extremum points have a universal dependence on step height and light's incident angle. Therefore, plotting variations of the distances of these extrema versus the phase, provides the phase due to the step and the height of the step with remarkable accuracy. We've applied these plots on experimentally obtained data of diffraction patterns from steps with different heights to measure their thickness, using two wavelengths, 532nm and 632.8nm.The uncertainty of the results is less than few nanometers.
Keywords: Extrema, Fresnel diffraction, Thickness, Thin film
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Type of Study: Research | Subject: Special
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Ganjkhani Y, Tavassoli M T, Hosseini S R, Jafari Siavashani M, Koohian A. Thickness measurement using the extrema of the intensity profile in Fresnel diffraction from a phase step. ICOP & ICPET. 2015; 21 :777-780
URL: http://opsi.ir/article-1-711-en.html


Volume 21 - Back to browse issues page
انجمن اپتیک و فوتونیک ایران Optics and Photonics Society of Iran
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