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Firoozifar A, Zabolian H, Varpaei M, Mardiha M, Jannesari M, Shahmohammadi J. Design And Fabrication of ITO Nanostructure Thin Film on Acrylic Substrate by DC Magnetron Sputtering and Evaluation of Its Optical and structural Properties. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :585-588
URL: http://opsi.ir/article-1-612-en.html
URL: http://opsi.ir/article-1-612-en.html
Alireza Firoozifar *1 
, Hosein Zabolian1 , Mahmood Varpaei1 , Mehdi Mardiha1 , Mohammad Jannesari1 , Javad Shahmohammadi1
, Hosein Zabolian1 , Mahmood Varpaei1 , Mehdi Mardiha1 , Mohammad Jannesari1 , Javad Shahmohammadi1
1- Isfahan Optic Industry
Abstract: (4252 Views)
In this research, we have optimized the condition of RF plasma etching and ITO thin film by DC magnetron sputtering system on acrylic substrates. We want to reach the best adhesion of thin film to the substrate, the maximum optical transmittance of samples in the visible range and the minimum electrical resistant of ITO thin film. The morphology of substrate and thin film were investigated and optimum condition for plasma etching and ITO coating were reached.
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