Since the plasma sources have many applications, they have been widely interested in recent years. In this article, by presenting a three-dimensional (3-D) and self-consistent model of the rectangular surface wave plasma source, the plasma fluid equations are discretized by the finite-difference (FD) method in the chamber of the plasma source. Following this, the differential relations resulted from the nonlinear PDEs are solved by the relaxation method for the two plasma parameters, plasma density and electron temperature, in three dimensions. The problem is studied for the two different values of argon gas pressure in the plasma chamber.

Keywords: Surface wave plasma, finite-difference (FD) method, fluid model.

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