The Ferroelectric thin films are widely used in microelectronic devices. It is important for these devices to have nonlinear dependence on electrical field. A good candidate is Barium Strontium Titanate (BST). BST thin film (Ba5.0 Sr5.0TiO3 ) has been deposited on Pt/Ti/SiO2 /Si substrates by pulsed laser deposition method with different area of one. The structure characterization and surface morphology of the BST thin films was performed by X-ray diffraction (XRD) and atomic force microscopy (AFM).

Keywords: Barium Strontium Titanate, Pulsed laser deposition, X-ray diffraction, Atomic force microscopy.

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