Accepted and Presented Articles of OPSI Conferences
مقالات پذیرفته و ارائه شده در کنفرانسهای انجمن اپتیک و فوتونیک ایران
ICOP & ICPET _ INPC _ ICOFS
Basic Sciences
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1392
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gregorian
2014
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مجموعه مقالات پذیرفته و ارائه شده در بیستمین کنفرانس اپتیک و فوتونیک ایران
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A Proposal for Design, Simulation and formation of a 0.45 μm thick Oxide on a Silicon Wafer
A Proposal for Design, Simulation and formation of a 0.45 μm thick Oxide on a Silicon Wafer
تخصصی
Special
پژوهشي
Research
In this paper we propose a method for formation of a 0.45 μm thick oxide on a 4 inch silicon wafer. We show that the simulation results are in very good agreement with practical process. We have used Athena TCAD package, Centrotherm oxidation tubes and optical microscope and α-step thickness measuring devices to simulate, fabricate and testing of the oxide.
In this paper we propose a method for formation of a 0.45 μm thick oxide on a 4 inch silicon wafer. We show that the simulation results are in very good agreement with practical process. We have used Athena TCAD package, Centrotherm oxidation tubes and optical microscope and α-step thickness measuring devices to simulate, fabricate and testing of the oxide.
Oxidation, silicon
Oxidation, silicon
1649
1652
http://opsi.ir/browse.php?a_code=A-10-1-80&slc_lang=en&sid=1
Elyar
Pourali
Elyar
Pourali
elyar.pourali@gmail.com
10031947532846002644
10031947532846002644
Yes
Tarbiat Modares University
Tarbiat Modares University
Mohammad
Daraie
Mohammad
Daraie
M_d_physics@yahoo.com
10031947532846002645
10031947532846002645
No
Pyame-Noor University
Pyame-Noor University
Ramin
Asadi
Ramin
Asadi
Asadi_24@yahoo.com
10031947532846002646
10031947532846002646
No
Azad University of Damavand
Azad University of Damavand