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Shahbazi A H, Azadeh M, Madani Pour K, Koohian A. Constructing Photomask for Mach – Zehnder Waveguide using Laser Scanning. ICOP & ICPET _ INPC _ ICOFS 2016; 22 :750-753
URL: http://opsi.ir/article-1-952-en.html
URL: http://opsi.ir/article-1-952-en.html
1- University of Tehran
2- AmirKabir University of Tech.
2- AmirKabir University of Tech.
Abstract: (2772 Views)
In this paper we describe a technique to construct a photo-mask which is used for Mach – Zehnder wave-guide. For this goal, a copper thin-film on glass substrate was deposited. Then with laser scanning ablation, the pattern of Mach – Zehnder wave-guide is created on the sample. A diode laser with wavelength of 405nm and total power of 65mW was used. The width of ablation is 8.5µm for a thin-film with a thickness of 100nm. The angle of Y junction is 2.8°.
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