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Ganjkhani Y, Tavassoli M T, Hosseini S R, Jafari Siavashani M, Koohian A. Thickness measurement using the extrema of the intensity profile in Fresnel diffraction from a phase step. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :777-780
URL: http://opsi.ir/article-1-711-en.html
URL: http://opsi.ir/article-1-711-en.html
Yasaman Ganjkhani * 
1, Mohammad Taghi Tavassoli1 , Seyed Roohollah Hosseini1 , Morteza Jafari Siavashani2 , Ataollah Koohian1
1, Mohammad Taghi Tavassoli1 , Seyed Roohollah Hosseini1 , Morteza Jafari Siavashani2 , Ataollah Koohian1
1- Tehran university
2- IASBS ,Zanjan
2- IASBS ,Zanjan
Abstract: (4074 Views)
In Fresnel
diffraction from a phase step, the intensity profile and spacing between its
extremum points have a universal dependence on step height and light's incident
angle. Therefore, plotting variations of the distances of these extrema versus
the phase, provides the phase due to the step and the height of the step with
remarkable accuracy. We've applied these plots on experimentally obtained data
of diffraction patterns from steps with different heights to measure their thickness,
using two wavelengths, 532nm and 632.8nm.The uncertainty of the results is less
than few nanometers.
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