Volume 21 -                   ICOP & ICPET _ INPC _ ICOFS 2015, 21 - : 177-180 | Back to browse issues page

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Determination of Thickness, Density and Roughness of ITO Thin Film by XRR Technique
Atefeh Tahernia * 1, Davood Raoufi1 , Leila Eftekhari1
1- Bu Ali Sina university
Abstract:   (4508 Views)
In this paper Indium Tin Oxide (ITO) thin films have been prepared on glass substrate by electron beam evaporation method. Then we use the X-ray reflectivity technique (XRR), and plot logarithmic chart of the intensity versus 2θ (θ is the incidence angle of x-ray). So, using the XRR data we compute the thickness, density and roughness of the ITO thin films. The results showed good agreement with AFM and transmittance spectra on UV-VIS-NIR range
Keywords: Thin film, X-Ray reflectivity (XRR), Indium Tin Oxide (ITO).
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Type of Study: Research | Subject: Special
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