Association Mission
The mission of the association is to advance the creation, communication and application of knowledge to benefit society and improve people's lives.
Legal Members
Membership
Contact Us
Download citation:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:
BibTeX | RIS | EndNote | Medlars | ProCite | Reference Manager | RefWorks
Send citation to:
parvizian M, rahimi ashtari F, goodarzi A, sabrlouie B, abbasi P. Structure investigation and residual stress optimization of Cr nanolayer on glass and GaAs substrates . ICOP & ICPET _ INPC _ ICOFS 2014; 20 :1053-1056
URL: http://opsi.ir/article-1-422-en.html
URL: http://opsi.ir/article-1-422-en.html
1- Iranian National Center for Laser Science and technology
Abstract: (5345 Views)
In this study surface roughness, deposition rate and residual stress of Cr thin film on glass and GaAs substrates were investigated by AFM analysis, thickness measurement and substrate curvature method. For this aim Cr layer with different thicknesses, 40-120 nm, was deposited on mentioned substrates by RF sputtering. Results show that deposition rate and surface roughness of Cr layer on glass is more than GaAs and on both substrates by increasing thickness, roughness increases. Also optimized thickness for residual stress obtained at 58 nm for GaAs substrate and at 62 nm for glass.
Send email to the article author
| Rights and permissions | |
 |
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License. |
