Tip-enhanced Raman spectroscopy (TERS) method provides chemical images on a nanometer scale from different surfaces by combining the chemical sensitivity of Raman spectroscopy and high resolution of the scanning probe microscopy (SPM) techniques. In this paper, an optimization of tip-enhanced Raman spectroscopy (TERS) system has been studied theoretically. In order to design and to construct a high efficiency TERS system as well as to achieve the best signal enhancement, it is necessary to recognize and simulate effective parameters. The tip and substrate structural parameters as well as the angle of laser radiation to tip are the most important factors for obtaining an optimal TERS configuration and the TERS system with two material of silicon and gold has been designed. The TERS system with the silicon tip is simpler and less costly, while the system with gold tip brings more enhancement.  Hope that the high-gain TERS systems designed and presented in this paper will be used in empirical configuration.

Keywords: Gold, Optimization, Silicon, Substrate, Tip-enhanced Raman spectroscopy.

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