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jandaghian A, lotfalian A, aray A, arjmand M, mohajerani E, saghafifar H. Simulation of ultra sensitive pressure sensor based on long range surface plasmon resonance.. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :933-936
URL: http://opsi.ir/article-1-825-en.html
URL: http://opsi.ir/article-1-825-en.html
Ali Jandaghian 
, Ali Lotfalian * 1, Ayda Aray , Mojtaba Arjmand , Ezodin Mohajerani , Hossein Saghafifar
, Ali Lotfalian * 1, Ayda Aray , Mojtaba Arjmand , Ezodin Mohajerani , Hossein Saghafifar
Abstract: (3612 Views)
In this study, a pressure sensor based on surface plasmon resonance and also the relations of the change in refractive index that is affected by the change of pressure is numerically investigated. The use of long range surface plasmon resonance will be more sensitive so the effect of metal and dielectric layer thickness on the operation of this type of sensor and optimum thickness is analyzed. For metal, the optimal thickness of 15 nm were obtained. For structure with optimal parameters, the sensor is able to vary the reflectance from 0.035 to 0.765 by applying a pressure as low as 0.96 kPa. The sensitivity of sensor is calculated about 8.6×〖10〗^(-6) deg/MPa.
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