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Volume 26 - ICOP & ICPET 2020
ICOP & ICPET _ INPC _ ICOFS 2020, 26 - ICOP & ICPET 2020: 581-584 |
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Malekzadeh P, Parsanasab G M, Mohajerani E. Fabrication and Polarization Characterization of SU8 Waveguides in Optical Integrated Circuits. ICOP & ICPET _ INPC _ ICOFS 2020; 26 :581-584
URL: http://opsi.ir/article-1-2124-en.html
URL: http://opsi.ir/article-1-2124-en.html
1- Shahid Beheshti University
Abstract: (1504 Views)
In this paper we emphasize on importance of optical integrated circuit in technology and material that used in fabrication of them. We also study the fabrication of polymeric waveguides with SU8 -2002.this material is a negative photoresist which changes from monomer to polymer by UV lithography and after developing and eliminate of monomers from sample surface can have any designed structures. Besides, the influence of polarization variation in this type of waveguides will be discussed.
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