en Experimental and Computer Calculated Sputtering Yield of Sputtered Au by Ne Ions at Different Energies and Various Incidence Angles تخصصی Special پژوهشي Research Nowadays a plenty of applications of thin film in different subjects such as scientific and industrial items has been grown. Au deposition is very important in microelectronic device fabrication. In this research project we studied Au sputtering in different energies and different angles of incident ions. Results show that the measured sputtering yield confirms the results that reached by TRIM.SP software. In specific range, sputtering yield increases by increasing energy and incident angle of bombardment ion particles. Nowadays a plenty of applications of thin film in different subjects such as scientific and industrial items has been grown. Au deposition is very important in microelectronic device fabrication. In this research project we studied Au sputtering in different energies and different angles of incident ions. Results show that the measured sputtering yield confirms the results that reached by TRIM.SP software. In specific range, sputtering yield increases by increasing energy and incident angle of bombardment ion particles. Au sputtering, sputtering yield, molecular dynamics model, incident ion energy, angle of sputtering collision ions Au sputtering, sputtering yield, molecular dynamics model, incident ion energy, angle of sputtering collision ions 1005 1008 http://opsi.ir/browse.php?a_code=A-10-1-382&slc_lang=en&sid=1 Ehsan Dorani Ehsan Dorani ehsandorrani@yahoo.com 10031947532846001486 10031947532846001486 Yes Islamic Azad University, Kahnouj Branch Islamic Azad University, Kahnouj Branch S. Peyman Abbasi S. Peyman Abbasi Pabbasi2001@gmail.com 10031947532846001487 10031947532846001487 No Iranian National Center for Laser Science and Technology Iranian National Center for Laser Science and Technology Abolhassan Alimoradi Abolhassan Alimoradi Abolalimo@gmail.com 10031947532846001488 10031947532846001488 No Iranian National Center for Laser Science and Technology Iranian National Center for Laser Science and Technology