TY - JOUR T1 - The Deposition and characterization of barium strontium titanate thin film by the pulsed laser deposition method TT - لایه نشانی و مشخصه یابی فیلم نازک باریم استرانتیم تیتانایت به روش لایه نشانی لیزر پالسی JF - opsi JO - opsi VL - 20 IS - 0 UR - http://opsi.ir/article-1-114-en.html Y1 - 2014 SP - 177 EP - 180 KW - Barium Strontium Titanate KW - Pulsed laser deposition KW - X-ray diffraction KW - Atomic force microscopy. N2 - The Ferroelectric thin films are widely used in microelectronic devices. It is important for these devices to have nonlinear dependence on electrical field. A good candidate is Barium Strontium Titanate (BST). BST thin film (Ba5.0 Sr5.0TiO3 ) has been deposited on Pt/Ti/SiO2 /Si substrates by pulsed laser deposition method with different area of one. The structure characterization and surface morphology of the BST thin films was performed by X-ray diffraction (XRD) and atomic force microscopy (AFM). M3 ER -