TY - JOUR JF - opsi JO - ICOP & ICPET _ INPC _ ICOFS VL - 21 IS - 0 PY - 2015 Y1 - 2015/3/01 TI - Measuring refractive index and thickness of transparent thin films using Fresnel diffraction from phase step TT - اندازه‌گیری ضریب‌شکست و ارتفاع لایه‌های نازک شفاف با استفاده از پراش فرنل از پله فازی N2 - Measuring optical parameters of thin films with high accuracy is a challenge in modern science and industry. We introduce a new method to obtain refractive index and thickness of transparent dielectric layer. This method is based on Fresnel diffraction from the phase step in transmission. By recording and analyzing the diffraction pattern versus incident angle, the diagram of visibility versus incident angle is obtained. Therefore by fitting simulated data to experimental ones (visibility versus incident angle), refractive index and height of phase step is determined. The uncertainties of determination of refractive index and thickness are about 0.5% and 0.1%, respectively. SP - 1473 EP - 1476 AU - Jafari Siavashani, Morteza AU - Tavassoly, Mohammad Taghi AU - Ahadi Akhlaghi, Ehsan AU - Hosseini, S. Roohollah AD - Institute for Advanced Studies in Basic Sciences KW - Fresnel Diffraction KW - Phase step KW - Thickness KW - Thin films KW - Refractive index. UR - http://opsi.ir/article-1-647-en.html ER -