@ARTICLE{Jafari Siavashani, author = {Jafari Siavashani, Morteza and Tavassoly, Mohammad Taghi and Ahadi Akhlaghi, Ehsan and Hosseini, S. Roohollah and }, title = {Measuring refractive index and thickness of transparent thin films using Fresnel diffraction from phase step}, volume = {21}, number = {0}, abstract ={Measuring optical parameters of thin films with high accuracy is a challenge in modern science and industry. We introduce a new method to obtain refractive index and thickness of transparent dielectric layer. This method is based on Fresnel diffraction from the phase step in transmission. By recording and analyzing the diffraction pattern versus incident angle, the diagram of visibility versus incident angle is obtained. Therefore by fitting simulated data to experimental ones (visibility versus incident angle), refractive index and height of phase step is determined. The uncertainties of determination of refractive index and thickness are about 0.5% and 0.1%, respectively. }, URL = {http://opsi.ir/article-1-647-en.html}, eprint = {http://opsi.ir/article-1-647-en.pdf}, journal = {Accepted and Presented Articles of OPSI Conferences}, doi = {}, year = {2015} }