@ARTICLE{Mohajerani, author = {Mohajerani, Sara and aakhte, Mostafa and Mostafavi Amjad, Jafar and Abdolahpour, Dariush and Ahadi Akhlaghi, Ehsan and }, title = {Three Dimensional Surface Topography Measurement by Phase Modulated Mirau Interferometeric Microscope}, volume = {20}, number = {0}, abstract ={In this paper, a method for measuring 3D surface topography by using a phase modulated Mirau interferometric microscope is presented. Phase shifting is one of the methods to analyze interference patterns of the microscope. In this research an LCD is used as a phase modulator to apply the phase shifts. The advantages of this method compared to the conventional methods are the possibility of high-speed data acquisition and non-mechanical phase shifting. }, URL = {http://opsi.ir/article-1-273-en.html}, eprint = {http://opsi.ir/article-1-273-en.pdf}, journal = {Accepted and Presented Articles of OPSI Conferences}, doi = {}, year = {2014} }