RT - Journal Article T1 - Deposition of Diamond-like carbon utilizing Physical vapor deposition JF - opsi YR - 2014 JO - opsi VO - 20 IS - 0 UR - http://opsi.ir/article-1-269-en.html SP - 581 EP - 584 K1 - diamond-like carbon K1 - deposition K1 - 7-13 µm range K1 - PVD AB - In this research, carbon deposited on ZnS as substrate and Y2O3 as meddle layer by Physical vapor deposition method. The effect of deposition rate on transparency of produced samples in infrared range were investigated by FTIR and Raman spectroscopy. It was observed that produced DLC films have different structural characteristics using various deposition rates. Samples produced with 30Ao/s deposition rate and temperature of 100 0C have more optical transmission and sp3 sites which was 32%. These samples showed better mechanical quality according to MIL-48616 standard. LA eng UL http://opsi.ir/article-1-269-en.html M3 ER -