@ARTICLE{Parsanasab, author = {Parsanasab, Gholam mohammad and Taghavi, Majid and Mostajeran, Samaneh and }, title = {spin-coated deposition of Chalcogenide for Lithography}, volume = {26}, number = {0}, abstract ={In this study, we first investigated the feasibility of a solution made of different types of chalcogenide powders and concluded that only amorphous chalcogenides could provide a suitable solution for spin-coated deposition. After repeating the experiments, we found that when we heat them in order to remove the solvent from the deposited films, this must be done under vacuum. Then, by direct laser writing with a continuous green laser at 100um /s at 3mw power on the films and chemically etching them, we achieved 2um optical waveguides. }, URL = {http://opsi.ir/article-1-2168-en.html}, eprint = {http://opsi.ir/article-1-2168-en.pdf}, journal = {Accepted and Presented Articles of OPSI Conferences}, doi = {}, year = {2020} }