%0 Journal Article %A akouchakiyan, mohadeseh %A Jannesari, Mohammad %A Ahmadvand, Hossein %T Design and fabrication of multi-layer beamsplitter coating in 3.5-5 µm & 8-12 µm wavelength regions %J Accepted and Presented Articles of OPSI Conferences %V 23 %N 0 %U http://opsi.ir/article-1-1281-en.html %R %D 2017 %K multi-layer beamsplitter coating, physical vapor deposition (PVD), %X In this research we report the design and fabrication of multi-layers beamsplitter coating in 3.5-5µm & 8-12µm wavelength regions. These multi-layer coated optics can be used to separate 3.5-5µm (in reflection channel)­­ and 8-12µm (in transmission channel) wavelength regions .The coating material combination used on Ge substrate was Ge as high index material and IR-F625 as high index material . Deposition was performed by physical vapor deposition (PVD) technique in a vacuum chamber by using electron gun and thermal boat. Quartz crystal was used for thickness control .Result achieve was 93.6% average reflection in 3.5-5µm region and 96.1% average transmission in 8-12 µm %> http://opsi.ir/article-1-1281-en.pdf %P 881-884 %& 881 %! %9 Research %L A-10-1-1261 %+ %G eng %@ 1126-3278 %[ 2017