This paper discusses the design and simulation of the ion beam extractor from an ion source using CST particle studio. It has been used to design the extraction system in order to produce a highly focused beam. Sevral changes was done at the geometry of the extraction system to focusing the ion beam, including creates a concave plasma meniscus, using of a quasi-pierce electrode at the beam periphery and using the spherical extraction electrodes with 14.5mm channel. We assume that, the extraction electrode channel length is equal to focal length of H+ ion beam. The focal length that was calculated with mathematical relations is consistent with the result of CST simulation.

Keywords: CST particle studio, ion source, extraction system.

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