This paper presents the fiber pressure sensor based on Fabry-Perote interferometry. The design and fabrication of the sensor are based on MEMS technique. The polymer diaphragm analysis was done theoretically. The pressure sensor response is approximately linear in the range from 0 to 15 Kpa at room temperature. For sensor with 1.1mm and 3.1 mm diaphragm thickness, the sensitivities are -644 nm/Kpa and -417 nm/Kpa with limit of detection of 4×10-3 Pa and 6×10-3Pa, respectively. Also, the young’s modulus and resonance frequency of diaphragm was calculated according to experimental results. The simple fabrication, small size, and linear response make the sensor suitable for many industrial applications.

Keywords: Diaphragm, Fabry-Perot, Fiber optic, Pressure sensor.

Full-Text [PDF 679 kb]   (3675 Downloads)